<?xml version="1.0"?>
<dblpperson name="Zhenchuan Yang" pid="08/8404" n="40">
<person key="homepages/08/8404" mdate="2010-09-02">
<author pid="08/8404">Zhenchuan Yang</author>
</person>
<r><article key="journals/sensors/YangZCGHY23" mdate="2023-09-30">
<author orcid="0009-0002-7416-2902" pid="296/9314">Lingmeng Yang</author>
<author orcid="0000-0002-5776-8665" pid="296/9539">Zhezheng Zhu</author>
<author orcid="0000-0003-4566-5519" pid="350/9667">Wangnan Chen</author>
<author pid="30/8407">Chengchen Gao</author>
<author pid="57/8403">Yilong Hao</author>
<author pid="08/8404">Zhenchuan Yang</author>
<title>Quantitative Analysis Method and Correction Algorithm Based on Directivity Beam Pattern for Mismatches between Sensitive Units of Acoustic Dyadic Sensors.</title>
<pages>5709</pages>
<year>2023</year>
<volume>23</volume>
<journal>Sensors</journal>
<number>12</number>
<ee type="oa">https://doi.org/10.3390/s23125709</ee>
<url>db/journals/sensors/sensors23.html#YangZCGHY23</url>
</article>
</r>
<r><inproceedings key="conf/nems/NieHMGY23" mdate="2023-08-14">
<author pid="354/0470">Shaoxiao Nie</author>
<author pid="57/8403">Yilong Hao</author>
<author pid="155/7153">Fanrui Meng</author>
<author pid="354/0294">Chenhchen Gao</author>
<author pid="08/8404">Zhenchuan Yang</author>
<title>A micro and low-cost packaging technology of high accuracy piezoresistive pressure sensors with Parylene coating.</title>
<pages>128-131</pages>
<year>2023</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS57332.2023.10190892</ee>
<crossref>conf/nems/2023</crossref>
<url>db/conf/nems/nems2023.html#NieHMGY23</url>
</inproceedings>
</r>
<r><article publtype="informal" key="journals/corr/abs-2307-09699" mdate="2023-07-25">
<author pid="90/6212">Zhihua Jin</author>
<author pid="201/7890">Gaoping Huang</author>
<author pid="84/8658">Zixin Chen</author>
<author pid="271/7469">Shiyi Liu</author>
<author pid="137/0828">Yang Chao</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="18/701">Quan Li</author>
<author pid="65/1792">Huamin Qu</author>
<title>ActorLens: Visual Analytics for High-level Actor Identification in MOBA Games.</title>
<year>2023</year>
<volume>abs/2307.09699</volume>
<journal>CoRR</journal>
<ee type="oa">https://doi.org/10.48550/arXiv.2307.09699</ee>
<url>db/journals/corr/corr2307.html#abs-2307-09699</url>
</article>
</r>
<r><article publtype="informal" key="journals/corr/abs-2312-14401" mdate="2024-01-17">
<author pid="84/8658">Zixin Chen</author>
<author pid="271/7469">Shiyi Liu</author>
<author pid="90/6212">Zhihua Jin</author>
<author pid="201/7890">Gaoping Huang</author>
<author pid="137/0828">Yang Chao</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="18/701">Quan Li</author>
<author pid="65/1792">Huamin Qu</author>
<title>Towards an Exploratory Visual Analytics System for Griefer Identification in MOBA Games.</title>
<year>2023</year>
<volume>abs/2312.14401</volume>
<journal>CoRR</journal>
<ee type="oa">https://doi.org/10.48550/arXiv.2312.14401</ee>
<url>db/journals/corr/corr2312.html#abs-2312-14401</url>
</article>
</r>
<r><article key="journals/sensors/ChangYZYHG21" mdate="2023-09-30">
<author pid="251/1360">Wenhan Chang</author>
<author orcid="0009-0002-7416-2902" pid="296/9314">Lingmeng Yang</author>
<author orcid="0000-0002-5776-8665" pid="296/9539">Zhezheng Zhu</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="57/8403">Yilong Hao</author>
<author pid="30/8407">Chengchen Gao</author>
<title>Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor.</title>
<pages>4337</pages>
<year>2021</year>
<volume>21</volume>
<journal>Sensors</journal>
<number>13</number>
<ee type="oa">https://doi.org/10.3390/s21134337</ee>
<url>db/journals/sensors/sensors21.html#ChangYZYHG21</url>
</article>
</r>
<r><inproceedings key="conf/interspeech/LiuYSYCZ21" mdate="2024-12-06">
<author pid="38/1796">Yufei Liu</author>
<author pid="136/5311">Chengzhu Yu</author>
<author pid="42/1503-16">Shuai Wang 0016</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="137/0828">Yang Chao</author>
<author pid="21/4415">Weibin Zhang</author>
<title>Non-Parallel Any-to-Many Voice Conversion by Replacing Speaker Statistics.</title>
<pages>1369-1373</pages>
<year>2021</year>
<booktitle>Interspeech</booktitle>
<ee type="oa">https://doi.org/10.21437/Interspeech.2021-557</ee>
<crossref>conf/interspeech/2021</crossref>
<url>db/conf/interspeech/interspeech2021.html#LiuYSYCZ21</url>
</inproceedings>
</r>
<r><inproceedings key="conf/interspeech/YangZLX21" mdate="2023-06-21">
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="21/4415">Weibin Zhang</author>
<author pid="38/1796">Yufei Liu</author>
<author pid="41/9939">Xiaofen Xing</author>
<title>Cross-Lingual Voice Conversion with Disentangled Universal Linguistic Representations.</title>
<pages>1604-1608</pages>
<year>2021</year>
<booktitle>Interspeech</booktitle>
<ee type="oa">https://doi.org/10.21437/Interspeech.2021-552</ee>
<crossref>conf/interspeech/2021</crossref>
<url>db/conf/interspeech/interspeech2021.html#YangZLX21</url>
</inproceedings>
</r>
<r><article publtype="informal" key="journals/corr/abs-1906-10834" mdate="2019-06-27">
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="77/2866">Chun Zhang</author>
<author pid="21/4415">Weibin Zhang</author>
<author pid="145/0531">Jianxiu Jin</author>
<author pid="120/6841">Dongpeng Chen</author>
<title>Essence Knowledge Distillation for Speech Recognition.</title>
<year>2019</year>
<volume>abs/1906.10834</volume>
<journal>CoRR</journal>
<ee type="oa">http://arxiv.org/abs/1906.10834</ee>
<url>db/journals/corr/corr1906.html#abs-1906-10834</url>
</article>
</r>
<r><article key="journals/chinaf/HeZZHYZY17" mdate="2026-02-01">
<author orcid="0000-0003-0826-3596" pid="78/8768">Chunhua He</author>
<author pid="164/9262">Jimeng Zhang</author>
<author pid="54/11433">Qiancheng Zhao</author>
<author pid="197/0962">Qinwen Huang</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="96/3425">Dacheng Zhang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>An electrical-coupling-suppressing MEMS gyroscope with feed-forward coupling compensation and scalable fuzzy control.</title>
<pages>42402</pages>
<year>2017</year>
<volume>60</volume>
<journal>Sci. China Inf. Sci.</journal>
<number>4</number>
<ee>https://doi.org/10.1007/s11432-015-0931-8</ee>
<url>db/journals/chinaf/chinaf60.html#HeZZHYZY17</url>
</article>
</r>
<r><inproceedings key="conf/nems/WeiHZYY17" mdate="2026-02-01">
<author pid="164/9215">Xianglei Wei</author>
<author orcid="0000-0003-0826-3596" pid="78/8768">Chunhua He</author>
<author pid="54/11433">Qiancheng Zhao</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>Research on the ring-diode based readout circuit for MEMS vibratory gyroscopes.</title>
<pages>619-622</pages>
<year>2017</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2017.8017099</ee>
<crossref>conf/nems/2017</crossref>
<url>db/conf/nems/nems2017.html#WeiHZYY17</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/LiuHZYYJ17" mdate="2026-02-01">
<author pid="36/5558">Tong Liu</author>
<author orcid="0000-0003-0826-3596" pid="78/8768">Chunhua He</author>
<author pid="54/11433">Qiancheng Zhao</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<author pid="83/3547">Yufeng Jin</author>
<title>Research on the Zero-Rate Output compensation for MEMS vibratory gyroscopes.</title>
<pages>804-807</pages>
<year>2017</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2017.8017140</ee>
<crossref>conf/nems/2017</crossref>
<url>db/conf/nems/nems2017.html#LiuHZYYJ17</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/ZhangHLLZYY15" mdate="2026-02-01">
<author pid="164/9262">Jimeng Zhang</author>
<author orcid="0000-0003-0826-3596" pid="78/8768">Chunhua He</author>
<author pid="38/7258">Yuxian Liu</author>
<author pid="35/10786">Dachuan Liu</author>
<author pid="54/11433">Qiancheng Zhao</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>A novel scale factor calibration method for a MEMS gyroscope based on virtual coriolis force.</title>
<pages>58-62</pages>
<year>2015</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2015.7147373</ee>
<crossref>conf/nems/2015</crossref>
<url>db/conf/nems/nems2015.html#ZhangHLLZYY15</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/GuanHLZYY15" mdate="2026-02-01">
<author pid="119/4407">Rui Guan</author>
<author orcid="0000-0003-0826-3596" pid="78/8768">Chunhua He</author>
<author pid="35/10786">Dachuan Liu</author>
<author pid="54/11433">Qiancheng Zhao</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>A temperature control system used for improving resonant frequency drift of MEMS gyroscopes.</title>
<pages>397-400</pages>
<year>2015</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2015.7147452</ee>
<crossref>conf/nems/2015</crossref>
<url>db/conf/nems/nems2015.html#GuanHLZYY15</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/YouTHZYZY15" mdate="2026-02-01">
<author pid="164/9273">Jun You</author>
<author pid="164/9344">Dayu Tian</author>
<author orcid="0000-0003-0826-3596" pid="78/8768">Chunhua He</author>
<author pid="54/11433">Qiancheng Zhao</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="96/3425">Dacheng Zhang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>A method to evaluate the influence of different substrate on stress mismatch induced deformation in MEMS accelerometer.</title>
<pages>421-425</pages>
<year>2015</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2015.7147458</ee>
<crossref>conf/nems/2015</crossref>
<url>db/conf/nems/nems2015.html#YouTHZYZY15</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/YanWHZYY15" mdate="2026-02-01">
<author pid="164/9247">Ruixuan Yan</author>
<author pid="164/9215">Xianglei Wei</author>
<author orcid="0000-0003-0826-3596" pid="78/8768">Chunhua He</author>
<author pid="54/11433">Qiancheng Zhao</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>Research on the resonant frequency of MEMS gyroscopes under varying tuning voltage.</title>
<pages>435-437</pages>
<year>2015</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2015.7147461</ee>
<crossref>conf/nems/2015</crossref>
<url>db/conf/nems/nems2015.html#YanWHZYY15</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/ZhangHZZYZY15" mdate="2026-02-01">
<author pid="29/1005">Pan Zhang</author>
<author orcid="0000-0003-0826-3596" pid="78/8768">Chunhua He</author>
<author pid="164/9262">Jimeng Zhang</author>
<author pid="54/11433">Qiancheng Zhao</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="96/3425">Dacheng Zhang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>Investigation of reliability of MEMS gyroscopes under different shock conditions.</title>
<pages>441-444</pages>
<year>2015</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2015.7147463</ee>
<crossref>conf/nems/2015</crossref>
<url>db/conf/nems/nems2015.html#ZhangHZZYZY15</url>
</inproceedings>
</r>
<r><article key="journals/chinaf/QianYY14" mdate="2020-03-02">
<author pid="98/1345">Liang Qian</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>A CMOS compatible process for monolithic integration of high-aspect-ratio bulk silicon microstructures.</title>
<pages>1-7</pages>
<year>2014</year>
<volume>57</volume>
<journal>Sci. China Inf. Sci.</journal>
<number>8</number>
<ee>https://doi.org/10.1007/s11432-014-5138-0</ee>
<url>db/journals/chinaf/chinaf57.html#QianYY14</url>
</article>
</r>
<r><inproceedings key="conf/nems/WangZNLLYYY14" mdate="2021-08-11">
<author pid="68/4459">Long Wang</author>
<author pid="54/11433">Qiancheng Zhao</author>
<author pid="299/2113">Minghao Nie</author>
<author pid="35/10786">Dachuan Liu</author>
<author pid="38/7258">Yuxian Liu</author>
<author pid="115/9656">Junjie Yan</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>Digital fast startup procedure for micro-machined vibratory gyroscopes using optimized fuzzy control strategy.</title>
<pages>208-211</pages>
<year>2014</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2014.6908792</ee>
<crossref>conf/nems/2014</crossref>
<url>db/conf/nems/nems2014.html#WangZNLLYYY14</url>
</inproceedings>
</r>
<r><article key="journals/chinaf/DingYWKY13" mdate="2020-03-02">
<author pid="74/8404">Haitao Ding</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="138/5902">Zhanfei Wang</author>
<author orcid="0000-0002-7213-1072" pid="22/8407">Michael Kraft</author>
<author pid="86/8403">Guizhen Yan</author>
<title>MEMS gyroscope control system using a band-pass continuous-time sigma-delta modulator.</title>
<pages>1-10</pages>
<year>2013</year>
<volume>56</volume>
<journal>Sci. China Inf. Sci.</journal>
<number>10</number>
<ee>https://doi.org/10.1007/s11432-012-4670-z</ee>
<url>db/journals/chinaf/chinaf56.html#DingYWKY13</url>
</article>
</r>
<r><inproceedings key="conf/nems/LiuHLYY13" mdate="2026-02-01">
<author pid="38/7258">Yuxian Liu</author>
<author orcid="0000-0003-0826-3596" pid="78/8768">Chunhua He</author>
<author pid="35/10786">Dachuan Liu</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>Digital closed-loop driver design of micromechanical gyroscopes based on coordinated rotation digital computer algorithm.</title>
<pages>1145-1148</pages>
<year>2013</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2013.6559924</ee>
<crossref>conf/nems/2013</crossref>
<url>db/conf/nems/nems2013.html#LiuHLYY13</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/WangYY12" mdate="2023-05-23">
<author pid="95/6913-6">Jiankun Wang 0006</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors.</title>
<pages>583-586</pages>
<year>2012</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2012.6196843</ee>
<crossref>conf/nems/2012</crossref>
<url>db/conf/nems/nems2012.html#WangYY12</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/GeLLYY12" mdate="2017-05-17">
<author pid="85/5048">Fei Ge</author>
<author pid="35/10786">Dachuan Liu</author>
<author pid="54/11430">Longtao Lin</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>Fast self-resonant startup procedure for digital MEMS gyroscope system.</title>
<pages>669-672</pages>
<year>2012</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2012.6196864</ee>
<crossref>conf/nems/2012</crossref>
<url>db/conf/nems/nems2012.html#GeLLYY12</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/ZhouSGYY12" mdate="2017-05-17">
<author pid="73/11430">Kailong Zhou</author>
<author pid="19/7814">Lina Sun</author>
<author pid="85/5048">Fei Ge</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>A capacitive readout circuit with DC sensing method for micromachined gyroscopes.</title>
<pages>712-715</pages>
<year>2012</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2012.6196874</ee>
<crossref>conf/nems/2012</crossref>
<url>db/conf/nems/nems2012.html#ZhouSGYY12</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/HeZCYY12" mdate="2026-02-01">
<author orcid="0000-0003-0826-3596" pid="78/8768">Chunhua He</author>
<author pid="54/11433">Qiancheng Zhao</author>
<author pid="41/5360">Jian Cui</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>A research of the bandwidth of a mode-matching MEMS vibratory gyroscope.</title>
<pages>738-741</pages>
<year>2012</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2012.6196880</ee>
<crossref>conf/nems/2012</crossref>
<url>db/conf/nems/nems2012.html#HeZCYY12</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/SunQHYY11" mdate="2024-02-13">
<author pid="19/7814">Lina Sun</author>
<author pid="98/1345">Liang Qian</author>
<author pid="115/9713">P. Z. Hong</author>
<author pid="86/8403">Guizhen Yan</author>
<author pid="08/8404">Zhenchuan Yang</author>
<title>Post CMOS integration of high aspect ratio SOI MEMS devices.</title>
<pages>166-169</pages>
<year>2011</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2011.6017321</ee>
<crossref>conf/nems/2011</crossref>
<url>db/conf/nems/nems2011.html#SunQHYY11</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/ZhangGLZYYY11" mdate="2017-05-17">
<author pid="61/10371">Xiaoyang Zhang</author>
<author pid="02/3682">Zhongyang Guo</author>
<author pid="54/11430">Longtao Lin</author>
<author pid="54/11433">Qiancheng Zhao</author>
<author pid="115/9656">Junjie Yan</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>A novel acceleration switch with hat-like contact separated from proof mass.</title>
<pages>221-224</pages>
<year>2011</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2011.6017334</ee>
<crossref>conf/nems/2011</crossref>
<url>db/conf/nems/nems2011.html#ZhangGLZYYY11</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/CuiGYHY11" mdate="2017-05-17">
<author pid="41/5360">Jian Cui</author>
<author pid="02/3682">Zhongyang Guo</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="57/8403">Yilong Hao</author>
<author pid="86/8403">Guizhen Yan</author>
<title>Improvement of transient response for drive loop of microgyroscope using 2-DOF PID controller.</title>
<pages>281-284</pages>
<year>2011</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2011.6017348</ee>
<crossref>conf/nems/2011</crossref>
<url>db/conf/nems/nems2011.html#CuiGYHY11</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/HongGYY11" mdate="2017-05-17">
<author pid="115/9534">Peizhen Hong</author>
<author pid="02/3682">Zhongyang Guo</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>A method to reduce notching effect on the anchors of a micro-gyroscope.</title>
<pages>338-341</pages>
<year>2011</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2011.6017362</ee>
<crossref>conf/nems/2011</crossref>
<url>db/conf/nems/nems2011.html#HongGYY11</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/QianHSYY11" mdate="2024-02-13">
<author pid="98/1345">Liang Qian</author>
<author pid="115/9713">P. Z. Hong</author>
<author pid="19/7814">Lina Sun</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>CMOS compatible process for suspended high-aspect-ratio integrated silicon microstructures.</title>
<pages>397-400</pages>
<year>2011</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2011.6017376</ee>
<crossref>conf/nems/2011</crossref>
<url>db/conf/nems/nems2011.html#QianHSYY11</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/JiangZLYY11" mdate="2017-05-17">
<author pid="115/9532">Senlin Jiang</author>
<author pid="96/3425">Dacheng Zhang</author>
<author pid="54/11430">Longtao Lin</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>Fabrication and testing of a novel silicon probe for micromachined surface profilers.</title>
<pages>406-409</pages>
<year>2011</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2011.6017378</ee>
<crossref>conf/nems/2011</crossref>
<url>db/conf/nems/nems2011.html#JiangZLYY11</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/LinLCGYY11" mdate="2017-05-17">
<author pid="54/11430">Longtao Lin</author>
<author pid="35/10786">Dachuan Liu</author>
<author pid="41/5360">Jian Cui</author>
<author pid="02/3682">Zhongyang Guo</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>Digital closed-loop controller design of a micromachined gyroscope based on auto frequency swept.</title>
<pages>654-657</pages>
<year>2011</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2011.6017440</ee>
<crossref>conf/nems/2011</crossref>
<url>db/conf/nems/nems2011.html#LinLCGYY11</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/LvYYCZC10" mdate="2017-05-17">
<author pid="116/0984">Jianan Lv</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<author pid="89/1069">Yong Cai</author>
<author pid="116/1152">Baoshun Zhang</author>
<author pid="80/1520">Kevin J. Chen</author>
<title>Residual stress characterization of GaN microstructures using bent-beam strain sensors.</title>
<pages>138-140</pages>
<year>2010</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2010.5592164</ee>
<crossref>conf/nems/2010</crossref>
<url>db/conf/nems/nems2010.html#LvYYCZC10</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/QianWYY10" mdate="2017-05-17">
<author pid="98/1345">Liang Qian</author>
<author pid="58/6299">Jia Wang</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>Fabrication of ultra-deep high-aspect-ratio isolation trench without void and its application.</title>
<pages>654-657</pages>
<year>2010</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2010.5592490</ee>
<crossref>conf/nems/2010</crossref>
<url>db/conf/nems/nems2010.html#QianWYY10</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/LuLCLCYY10" mdate="2017-05-17">
<author pid="116/1026">Niannian Lu</author>
<author pid="35/10786">Dachuan Liu</author>
<author pid="41/5360">Jian Cui</author>
<author pid="54/11430">Longtao Lin</author>
<author pid="116/1265">Xiaozhu Chi</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>An FPGA implementation of the LMS adaptive filter for MEMS gyroscope.</title>
<pages>744-747</pages>
<year>2010</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2010.5592263</ee>
<crossref>conf/nems/2010</crossref>
<url>db/conf/nems/nems2010.html#LuLCLCYY10</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/JiangZYY10" mdate="2017-05-17">
<author pid="115/9532">Senlin Jiang</author>
<author pid="96/3425">Dacheng Zhang</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>Design and fabrication of a novel silicon probe for micromachined surface profilers.</title>
<pages>941-944</pages>
<year>2010</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2010.5592110</ee>
<crossref>conf/nems/2010</crossref>
<url>db/conf/nems/nems2010.html#JiangZYY10</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/SunLYY10" mdate="2024-02-13">
<author pid="19/7814">Lina Sun</author>
<author pid="368/3001">T. Ming-Hung Lee</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>Fabrication of Sub-100-nm silicon nanowire devices on SOI wafer by CMOS compatible fabrication process.</title>
<pages>971-974</pages>
<year>2010</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2010.5592606</ee>
<crossref>conf/nems/2010</crossref>
<url>db/conf/nems/nems2010.html#SunLYY10</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/WeiMYY10" mdate="2023-05-10">
<author pid="346/5839">Yumin Wei</author>
<author pid="93/7399">Xu Mao</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>A single mask dry releasing process for making high aspect ratio soimemsdevices.</title>
<pages>1040-1043</pages>
<year>2010</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2010.5592579</ee>
<crossref>conf/nems/2010</crossref>
<url>db/conf/nems/nems2010.html#WeiMYY10</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/DingYY09" mdate="2023-03-23">
<author pid="74/8404">Haitao Ding</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>Performance comparison of methods to evading notching effect for SOG structures in DRIE.</title>
<pages>5-8</pages>
<year>2009</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2009.5068514</ee>
<ee>https://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068514</ee>
<crossref>conf/nems/2009</crossref>
<url>db/conf/nems/nems2009.html#DingYY09</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/MaoYLY09" mdate="2023-03-23">
<author pid="93/7399">Xu Mao</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="28/5557">Zhihong Li</author>
<author pid="86/8403">Guizhen Yan</author>
<title>The method of prevent footing effect in making SOI micro-mechanical structure.</title>
<pages>506-509</pages>
<year>2009</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2009.5068629</ee>
<ee>https://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068629</ee>
<crossref>conf/nems/2009</crossref>
<url>db/conf/nems/nems2009.html#MaoYLY09</url>
</inproceedings>
</r>
<r><inproceedings key="conf/nems/LiYY09" mdate="2023-03-23">
<author pid="86/6196">Yuan Li</author>
<author pid="08/8404">Zhenchuan Yang</author>
<author pid="86/8403">Guizhen Yan</author>
<title>An improved method to remove anti-footing Al layer after DRIE.</title>
<pages>868-871</pages>
<year>2009</year>
<booktitle>NEMS</booktitle>
<ee>https://doi.org/10.1109/NEMS.2009.5068712</ee>
<ee>https://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068712</ee>
<crossref>conf/nems/2009</crossref>
<url>db/conf/nems/nems2009.html#LiYY09</url>
</inproceedings>
</r>
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<co c="0"><na f="c/Cai:Yong" pid="89/1069">Yong Cai</na></co>
<co c="0"><na f="c/Chang:Wenhan" pid="251/1360">Wenhan Chang</na></co>
<co c="0"><na f="c/Chao:Yang" pid="137/0828">Yang Chao</na></co>
<co c="0"><na f="c/Chen:Dongpeng" pid="120/6841">Dongpeng Chen</na></co>
<co c="0"><na f="c/Chen:Kevin_J=" pid="80/1520">Kevin J. Chen</na></co>
<co c="0"><na f="c/Chen:Wangnan" pid="350/9667">Wangnan Chen</na></co>
<co c="0"><na f="c/Chen:Zixin" pid="84/8658">Zixin Chen</na></co>
<co c="0"><na f="c/Chi:Xiaozhu" pid="116/1265">Xiaozhu Chi</na></co>
<co c="0"><na f="c/Cui:Jian" pid="41/5360">Jian Cui</na></co>
<co c="0"><na f="d/Ding:Haitao" pid="74/8404">Haitao Ding</na></co>
<co c="0"><na f="g/Gao:Chengchen" pid="30/8407">Chengchen Gao</na></co>
<co c="0"><na f="g/Gao:Chenhchen" pid="354/0294">Chenhchen Gao</na></co>
<co c="0"><na f="g/Ge:Fei" pid="85/5048">Fei Ge</na></co>
<co c="0"><na f="g/Guan:Rui" pid="119/4407">Rui Guan</na></co>
<co c="0"><na f="g/Guo:Zhongyang" pid="02/3682">Zhongyang Guo</na></co>
<co c="0"><na f="h/Hao:Yilong" pid="57/8403">Yilong Hao</na></co>
<co c="0"><na f="h/He:Chunhua" pid="78/8768">Chunhua He</na></co>
<co c="0"><na f="h/Hong:P=_Z=" pid="115/9713">P. Z. Hong</na></co>
<co c="0"><na f="h/Hong:Peizhen" pid="115/9534">Peizhen Hong</na></co>
<co c="0"><na f="h/Huang:Gaoping" pid="201/7890">Gaoping Huang</na></co>
<co c="0"><na f="h/Huang:Qinwen" pid="197/0962">Qinwen Huang</na></co>
<co c="0"><na f="j/Jiang:Senlin" pid="115/9532">Senlin Jiang</na></co>
<co c="0"><na f="j/Jin:Jianxiu" pid="145/0531">Jianxiu Jin</na></co>
<co c="0"><na f="j/Jin:Yufeng" pid="83/3547">Yufeng Jin</na></co>
<co c="0"><na f="j/Jin:Zhihua" pid="90/6212">Zhihua Jin</na></co>
<co c="0"><na f="k/Kraft:Michael" pid="22/8407">Michael Kraft</na></co>
<co c="0"><na f="l/Lee:T=_Ming=Hung" pid="368/3001">T. Ming-Hung Lee</na></co>
<co c="0"><na f="l/Li:Quan" pid="18/701">Quan Li</na></co>
<co c="0"><na f="l/Li:Yuan" pid="86/6196">Yuan Li</na></co>
<co c="0"><na f="l/Li:Zhihong" pid="28/5557">Zhihong Li</na></co>
<co c="0"><na f="l/Lin:Longtao" pid="54/11430">Longtao Lin</na></co>
<co c="0"><na f="l/Liu:Dachuan" pid="35/10786">Dachuan Liu</na></co>
<co c="0"><na f="l/Liu:Shiyi" pid="271/7469">Shiyi Liu</na></co>
<co c="0"><na f="l/Liu:Tong" pid="36/5558">Tong Liu</na></co>
<co c="0"><na f="l/Liu:Yufei" pid="38/1796">Yufei Liu</na></co>
<co c="0"><na f="l/Liu:Yuxian" pid="38/7258">Yuxian Liu</na></co>
<co c="0"><na f="l/Lu:Niannian" pid="116/1026">Niannian Lu</na></co>
<co c="0"><na f="l/Lv:Jianan" pid="116/0984">Jianan Lv</na></co>
<co c="0"><na f="m/Mao:Xu" pid="93/7399">Xu Mao</na></co>
<co c="0"><na f="m/Meng:Fanrui" pid="155/7153">Fanrui Meng</na></co>
<co c="0"><na f="n/Nie:Minghao" pid="299/2113">Minghao Nie</na></co>
<co c="0"><na f="n/Nie:Shaoxiao" pid="354/0470">Shaoxiao Nie</na></co>
<co c="0"><na f="q/Qian:Liang" pid="98/1345">Liang Qian</na></co>
<co c="0"><na f="q/Qu:Huamin" pid="65/1792">Huamin Qu</na></co>
<co c="0"><na f="s/Sun:Lina" pid="19/7814">Lina Sun</na></co>
<co c="0"><na f="t/Tian:Dayu" pid="164/9344">Dayu Tian</na></co>
<co c="0"><na f="w/Wang:Jia" pid="58/6299">Jia Wang</na></co>
<co c="0"><na f="w/Wang_0006:Jiankun" pid="95/6913-6">Jiankun Wang 0006</na></co>
<co c="0"><na f="w/Wang:Long" pid="68/4459">Long Wang</na></co>
<co c="0"><na f="w/Wang_0016:Shuai" pid="42/1503-16">Shuai Wang 0016</na></co>
<co c="0"><na f="w/Wang:Zhanfei" pid="138/5902">Zhanfei Wang</na></co>
<co c="0"><na f="w/Wei:Xianglei" pid="164/9215">Xianglei Wei</na></co>
<co c="0"><na f="w/Wei:Yumin" pid="346/5839">Yumin Wei</na></co>
<co c="0"><na f="x/Xing:Xiaofen" pid="41/9939">Xiaofen Xing</na></co>
<co c="0"><na f="y/Yan:Guizhen" pid="86/8403">Guizhen Yan</na></co>
<co c="0"><na f="y/Yan:Junjie" pid="115/9656">Junjie Yan</na></co>
<co c="0"><na f="y/Yan:Ruixuan" pid="164/9247">Ruixuan Yan</na></co>
<co c="0"><na f="y/Yang:Lingmeng" pid="296/9314">Lingmeng Yang</na></co>
<co c="0"><na f="y/You:Jun" pid="164/9273">Jun You</na></co>
<co c="0"><na f="y/Yu:Chengzhu" pid="136/5311">Chengzhu Yu</na></co>
<co c="0"><na f="z/Zhang:Baoshun" pid="116/1152">Baoshun Zhang</na></co>
<co c="0"><na f="z/Zhang:Chun" pid="77/2866">Chun Zhang</na></co>
<co c="0"><na f="z/Zhang:Dacheng" pid="96/3425">Dacheng Zhang</na></co>
<co c="0"><na f="z/Zhang:Jimeng" pid="164/9262">Jimeng Zhang</na></co>
<co c="0"><na f="z/Zhang:Pan" pid="29/1005">Pan Zhang</na></co>
<co c="0"><na f="z/Zhang:Weibin" pid="21/4415">Weibin Zhang</na></co>
<co c="0"><na f="z/Zhang:Xiaoyang" pid="61/10371">Xiaoyang Zhang</na></co>
<co c="0"><na f="z/Zhao:Qiancheng" pid="54/11433">Qiancheng Zhao</na></co>
<co c="0"><na f="z/Zhou:Kailong" pid="73/11430">Kailong Zhou</na></co>
<co c="0"><na f="z/Zhu:Zhezheng" pid="296/9539">Zhezheng Zhu</na></co>
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