Seyyed Ehsan Esfahani Rashidi
Weishen Chu
Seyyed Ehsan Esfahani Rashidi
Yanli Zhang
Johann Alsmeier
Toshiyuki Sega
An Analytical Model for Thin Film Pattern-dependent Asymmetric Wafer Warpage Prediction.
1-4
2022
IMW
https://doi.org/10.1109/IMW52921.2022.9779248
conf/imw2/2022
db/conf/imw2/imw2022.html#ChuRZAS22
Johann Alsmeier
Weishen Chu
Toshiyuki Sega
Yanli Zhang