A 336 x 240 Backside-Illuminated 3D-Stacked 7μm SPAD for LiDAR Sensor with PDE 28% at 940nm and under 0.4% Depth Accuracy Up to 10m.

Ahyoung Cho Jaehyung Jang Jongchae Kim Sunho Oh Kyungsu Byun Dahwan Park Jihee Han Hanseung Lee Suhyun Yi Hoonmoo Choi Jongeun Kim Namil Kim Yongtae Gim Minkyu Kim Sangyoung Lee Hansang Kim Eunchang Lee Minsang Yu Jeongjoon Hwang Seunghyun Yoon Kwang Hwangbo Heesang Kim Ahyoung Cho Taejun Baek Sooyoung Park Kwangjun Cho Wonje Park Kyung-Do Kim Hoesam Jeong Hoon Sang Oh Changrock Song A 336 x 240 Backside-Illuminated 3D-Stacked 7μm SPAD for LiDAR Sensor with PDE 28% at 940nm and under 0.4% Depth Accuracy Up to 10m. 1-2 2024 VLSI Technology and Circuits https://doi.org/10.1109/VLSITechnologyandCir46783.2024.10631458 conf/vlsit/2024 db/conf/vlsit/vlsit2024.html#JangKOBPHLYCKKG24 Taejun Baek Kyungsu Byun Kwangjun Cho Hoonmoo Choi Yongtae Gim Jihee Han Jeongjoon Hwang Kwang Hwangbo Jaehyung Jang Hoesam Jeong Hansang Kim Heesang Kim Jongchae Kim Jongeun Kim Kyung-Do Kim Minkyu Kim Namil Kim Eunchang Lee Hanseung Lee Sangyoung Lee Hoon Sang Oh Sunho Oh Dahwan Park Sooyoung Park Wonje Park Changrock Song Suhyun Yi Seunghyun Yoon Minsang Yu