Challenges of Cu CMP of TSVs and RDLs fabricated from the backside of a thin wafer.

John H. Lau Jui-Chin Chen John H. Lau Tzu-Chien Hsu Chien-Chou Chen Pei-Jer Tzeng Po-Chih Chang Chun-Hsien Chien Yiu-Hsiang Chang Shang-Chun Chen Yu-Chen Hsin Sue-Chen Liao Cha-Hsin Lin Tzu-Kun Ku Ming-Jer Kao Challenges of Cu CMP of TSVs and RDLs fabricated from the backside of a thin wafer. 1-5 2013 3DIC https://doi.org/10.1109/3DIC.2013.6702335 conf/3dic/2013 db/conf/3dic/3dic2013.html#ChenLHCTCCCCHLLKK13

John H. Lau Tang Gong Yue Effects of TSVs (through-silicon vias) on thermal performances of 3D IC integration system-in-package (SiP). 2660-2669 2012 52 Microelectron. Reliab. 11 https://doi.org/10.1016/j.microrel.2012.04.002 db/journals/mr/mr52.html#LauY12

John H. Lau Recent advances and new trends in nanotechnology and 3D integration for semiconductor industry. 1-23 2011 3DIC https://doi.org/10.1109/3DIC.2012.6262979 conf/3dic/2011 db/conf/3dic/3dic2011.html#Lau11

Yue Ying Ong Soon Wee Ho Kripesh Vaidyanathan Vasarla Nagendra Sekhar Ming Chinq Jong Samuel Lim Yak Long Vincent Lee Wen Sheng Leong Ching Wai Vempati Srinivasa Rao Jimmy Ong Xuefen Ong Xiaowu Zhang Yoon Uk Seung John H. Lau Yeow Kheng Lim David Yeo Kai Chong Chan Yanfeng Zhang 0001 Juan Boon Tan Dong Kyun Sohn Design, assembly and reliability of large die and fine-pitch Cu/low-k flip chip package. 986-994 2010 50 Microelectron. Reliab. 7 https://doi.org/10.1016/j.microrel.2010.03.010 db/journals/mr/mr50.html#OngHVSJLSWROOZSLLYCYTS10

Ying Huang Ming Tang 0005 Ping Shum 0001 Jing Zhang John H. Lau Design and analysis of bi-directional pumping silicon Raman laser. 76:1-76:5 2008 ICAIT https://doi.org/10.1145/1509315.1509391 conf/icait/2008 db/conf/icait/icait2008.html#HuangT0ZL08 Kai Chong Chan Po-Chih Chang Yiu-Hsiang Chang Chien-Chou Chen Jui-Chin Chen Shang-Chun Chen Chun-Hsien Chien Soon Wee Ho Yu-Chen Hsin Tzu-Chien Hsu Ying Huang Ming Chinq Jong Ming-Jer Kao Tzu-Kun Ku Sue-Chen Liao Yeow Kheng Lim Cha-Hsin Lin Samuel Lim Yak Long Jimmy Ong Xuefen Ong Yue Ying Ong Vempati Srinivasa Rao Vasarla Nagendra Sekhar Yoon Uk Seung Vincent Lee Wen Sheng Perry Ping ShumPing Shum 0001 Dong Kyun Sohn Juan Boon Tan Ming Tang 0005 Pei-Jer Tzeng Kripesh Vaidyanathan Eva Leong-Ching WaiLeong Ching Wai David Yeo Tang Gong Yue Jing Zhang Xiaowu Zhang Yanfeng Zhang 0001