A capacitive readout circuit with DC sensing method for micromachined gyroscopes.

Sun, 01 Jan 2012 00:00:00 +0100

Kailong Zhou, Lina Sun, Fei Ge, Zhenchuan Yang, Guizhen Yan:
A capacitive readout circuit with DC sensing method for micromachined gyroscopes. NEMS 2012: 712-715