Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology.

N. Outaleb Sandrine Lucas N. Outaleb Olivier Bonnaud J. Pine Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology. 28-29 1999 conf/mse/1999 MSE https://doi.org/10.1109/MSE.1999.787021 https://doi.ieeecomputersociety.org/10.1109/MSE.1999.787021 db/conf/mse/mse1999.html#LucasOBP99 Olivier Bonnaud Sandrine Lucas J. Pine