Daniel Tonke Tae-Eog Lee Scheduling of a dual-armed cluster tool with two independent robot arms. 200-205 2012 CASE https://doi.org/10.1109/CoASE.2012.6386426 https://www.wikidata.org/entity/Q58199756 conf/case/2012 db/conf/case/case2012.html#TonkeL12