<?xml version="1.0" encoding="US-ASCII"?>
<dblp>
<incollection key="reference/auto/Lee09" mdate="2017-05-16">
<author>Tae-Eog Lee</author>
<title>Semiconductor Manufacturing Automation.</title>
<pages>911-926</pages>
<year>2009</year>
<booktitle>Handbook of Automation</booktitle>
<ee>https://doi.org/10.1007/978-3-540-78831-7_52</ee>
<crossref>reference/auto/2009</crossref>
<url>db/reference/auto/auto2009.html#Lee09</url>
</incollection></dblp>
